Introduction aux systèmes microélectromécaniques MEMS
An Introduction to MEMS Micro Electro Mechanical Systems Microelectromechanical systems (MEMS) are devices that have moving parts that are made of microscopic components. They are also called micromechatronics and microsystems. At the nanoscale, they merge into nanoelectromechanical systems or nanotechnology. Nanotubes are a fundamental unit process for manufacturing mems micro electro mechanical systems The researchers […]