MEMSマイクロ電気機械システム入門
An Introduction to MEMS Micro Electro Mechanical Systems Microelectromechanical systems (MEMS) are devices that have moving parts that are made of microscopic components. They are also called micromechatronics and microsystems. At the nanoscale, they merge into nanoelectromechanical systems or nanotechnology. Nanotubes are a fundamental unit process for manufacturing mems micro electro mechanical systems The researchers at the University of Illinois have made a major breakthrough in microelectromechanical systems, and the discovery has a broad range of applications. Nanotubes are a fundamental unit process in manufacturing mems micro electro mechanical systems, and their work has implications for the design of many new kinds of mems. They have demonstrated that nanotubes can […]